Piezoresistive Sensors for MEMS Device Having Rejection of Undesired Motion

Abstract

Briefly, in accordance with one or more embodiments, a piezoresistive stress
sensor comprises a plurality of piezoresistive elements coupled in a bridge
circuit disposed on, near, or contiguous to a flexure to detect torsional
flexing about an axis of the flexure. The bridge circuit has at least two nodes
disposed along the axis of the flexure and at least two nodes disposed off the
axis of the flexure to maximize, or nearly maximize, an output of the bridge
circuit in response to the torsional flexing of the flexure. A torsional flexing
component of the output signal of the bridge circuit is relatively increased
with respect to a component of the output signal generated by non-torsional
stress of the flexure, or a component of the output signal generated by
non-torsional stress of the flexure is reduced with respect to the torsional
flexing component of the output signal, or combinations thereof.

http://appft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=2&f=G&l=50&co1=AND&d=PG01&s1=microvision&s2=scanning&OS=microvision+AND+scanning&RS=microvision+AND+scanning

(with thanks to me_wwwing, Yahoo private MVIS board